Can't delete 5000 entities created by Remote HAS Loop

Hi
through a misconfiguration of Remote Home Assistant a loop between 2 systems occurred an created on both ends 50k entities.
I’re able to delete most of them but 5k still remaining and aren’t deletable.
“You can only delete 0 of the 1 entities. The others require the integration to stop providing them, and sometimes a Home Assistant restart is needed. Are you sure you want to delete the deletable entities? Remove them from your dashboard and automations if they include these entities.”

The integration doesn’t exist anymore and HAS was restarted countless times, also there are no dashboards nor automations with them.

Any ideas on how to brut force the delete of these entities?

Many thanks in advance, Silas

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